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210C Inline Chemical Heater Unmatched Semiconductor Process Inline Fluid Heater

Basic Information
Place of Origin: China
Brand Name: Precise Heater
Certification: CSA,UL,CE
Model Number: UH202
Minimum Order Quantity: 1 unit
Price: US$3,000 - 9,000 / unit
Packaging Details: Export Wooden Case
Delivery Time: 15-25 days
Payment Terms: L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability: 30 units per month
Detail Information
Material: PFA/PTFE/PVDF Color: White
Safety Features: Liquid Level Sensor,Ground Wire Options Applications: Semiconductor Wet Processes,Solar/Photovoltaic Wafer Cleaning
SPECIFICATIONS: 1,000 Watts Up To 18,000 Watts Voltages: 110 To 600 Volts, Single Or Three Phase
High Light:

210C Inline Chemical Heater

,

18kW Inline Chemical Heater

,

Semiconductor Process Inline Fluid Heater


Product Description

Inline Chemical Heater Performs Unmatched Semiconductor Process Fluid Heating

 

Now heat semiconductor process fluids up to 210°C!

 

Faster heatup: Single heater chamber sizes up to 18kW.

Rapid installation: Customized plumbing connections

Long heater life for reduced cost of ownership (COO):

Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.

Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.

Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.

Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.

Excellent temperature stability: Low watt density design enables accurate control of process temperature.

 

Applications Include:

 

SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)

Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:

Hydrochloric (HCl)

Hydrofluoric (HF)

Acetic (C2H4O2)

Nitric (HNO3)

Sulfuric (H2SO4)

Sulfuric acid and hydrogen peroxide

Sulfuric acid and ozone (O3)

Hydrofluoric acid and glycol (C2H6O2)

Potassium hydroxide (KOH)

Sodium hydroxide (NaOH)

Electroless nickel Electroless copper Electroless gold Deionized water

Some solvents (consult factory)

210C Inline Chemical Heater Unmatched Semiconductor Process Inline Fluid Heater 0210C Inline Chemical Heater Unmatched Semiconductor Process Inline Fluid Heater 1

 

Benefits and Specifications

 
  • Unmatched heating of semiconductor process fluids upto 210°C.

  • Patented heater gas purge system ensures long element life and reduced cost of ownership.

  • Thick walled chamber provides long service life in the harshest high temperature applications.

  • Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

  • All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.

  • Low watt density design enables precise and stable control of process temperature.

  • PVDF high temperature mounting brackets (Hightemperature model)

     

  • Options:

  • Horizontally mounted configuration

  • Integral cooling coils

  • 100 ohm RTDs or “J”, “K”, or “E” type process and

    element thermocouples

  • Lower watt density heaters for special applications

Specifications:

 

Service:
Inline chemical heater with all fluoropolymer wetted

surfaces for virtually any wet chemistry application.

 

Temperature Range: Up to 210°C.

 

Maximum Working Pressure:

100 PSIG (7 Bar) at 25oC

43 PSIG (. Bar) at 180oC

 

Heater Sizes: 1,000 watts up to 18,000 watts

 

Heater Voltages Available:
200 to 600 volts, single or three phase (12kW and

larger requires three phase).


Watt Density: 10 watts per square inch (1.5w/cm2)

 

Fluid Connections Available:
1⁄4” (6mm) to 1” (25mm) flared
1⁄2” (12mm) to 1” (25mm) Super 300 Type Pillar®

Other connections available, consult factory

 

Third Party Certificatons: CE, UL, Semi S2 and S3

 

Element Purge:
Small amount of clean dry air (CDA) or N2 gas flows

between the metal grounded element and the PTFE sheath

 

Applications

Semiconductor Wet Processes

Sterilization/Cleaning

Solar/Photovoltaic Wafer Cleaning

 

 

Safety Features

 

  • Liquid level sensor

  • Ground wire options

  • Over-temperature thermocouple

  • Process thermocouple

  •  

  • ​Options

  •  

  • Thermal cutoff

  • Thermocouples

  • Fiber-optic liquid level sensor

  • RTD sensors

  • Pressure relief valve

 

 

Model

LP1

LP7

Wetted Material

PVDF/PFA

PVDF/PFA

Housing Material

Pipe

Pipe

Max Temp

95°C

95°C

Pressure

60 psi at 95°C

60 psi at 95°C

Power*

1-15 kW

1-18 kW

Accuracy

± 0.1o C

± 0.1o C

Voltages**

200-480 VAC, 1 and 3-phase

200-600 VAC, 1 and 3-phase 

Flow

0.5-32 gpm (1.9-122 L/min)

0.5-32 gpm (1.9-122 L/min)

Benefits

Variable height

Higher flow, kW

 

 

  •  
  • FEP and PFA Immersion Coil heat exchanger

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Contact Details
Sam Leo

Phone Number : 13760888064

WhatsApp : +8613760888064